best thing to do here is to fill, and put down a subfloor....which can be bought at your local home depot or lowe's.......Flooring dept. has what they call cement board in varying thicknesses to help with leveling and also better seal to the tiles(ceramic tiles)
For vinyl tiles Home Depot carries a product called HARDI BACKER which almost resembles a sheet of drywall.....but is for use for flooring or tiling walls.....this also comes in varying thinknesses...both of these products are screwed to your existing floor