I've always just used regular concrete drill bits with a regular (not hammer) drills. Some tile is really hard and might need a diamond drill bit. I would drill right through the tile and backer board and have the screws bite into the wood subfloor. Be very careful not to overtighten them as you can crack the pedestal very easily. It probably isn't even necessary to tighten them a lot as they usually are just to keep the bottom from kicking out.
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