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If this does not help the only solution may be to redo the entire floor, tile and all. Use a product called “Hardibacker” screwed into the floor joists using the special screws made for this application. This is a ¼” thick cement and fiber based product made for use under ceramic tile. Be sure to stagger the seams. (Check the floor very carefully first to make certain there are no weak spots that are deflecting (even the slightest bit) when walked on. If you find any they must be repaired first either by cutting them out and replacing them or by adding additional blocking underneath. The sub floor MUST BE devoid of any soft areas prone to deflection.
Good luck and I hope you do not have to re-do the entire floor.